Teguh Yogaraksa1 Muhammad Hikam1, Irzaman2
1Department of Physics, FMIPA Universitas
E-mail : teguhyr@yahoo.com or hikam@ui.edu
2Department of Physics, FMIPA IPB, Jl. Raya
Abstract
A procedure to obtain the all components of crystal structure by simultaneous Rietveld refinement of x-ray diffraction pattern collected is described. The specimens used were lead zircone titanate (PZT) thin films prepared by chemical solution deposition (CSD) and deposited on Si(100) and Si(100)/Pt(200) substrates. The growth condition to obtain high quality epytaxial of thin lead zircone titanate was carried out by spin coating at angular velocities 2500, 3000, 3500 rpm for 30 seconds and they were annealed at 750°C for 3 hours. We made single and multi layers films.
For 21 specimens with different treatments, we have refined 8 parameters include lattice parameters, background, absorption coefficient, atomic positions, two theta zero error, thermal factors, and profile peak functions. Most the samples show that the crystal structure are tetragonal with space group is P4mm.Thermal effect and profile function refinement make fitted better than other effect in refinement. The plane orientation (100) and (200) sometimes was noticed as an effect of substrate, but it was indeed the growth of PZT thin film was confirmed. .
Keywords: Rietveld Analysis, PZT, Thin Films
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